The trouble starts with using electrons: putting charging effect correction models to the test

Timo Wandel; Clemens Utzny; Noriaki Nakayamada

doi:10.1117/12.898755

13 October 2011 The trouble starts with using electrons: putting charging effect correction models to the test

Timo Wandel, Clemens Utzny, Noriaki Nakayamada

Proceedings Volume 8166, Photomask Technology 2011; 81661C (2011) https://doi.org/10.1117/12.898755
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

Improvement of pattern placement accuracy is essential to solve upcoming challenges in mask making. Placement errors are driven by multiple effects with electron mediated resist surface charging being a major error source. Modeling this systematic effect thus allows the determination of the placement errors before plate processing. This opens the door to an effective charging compensation. In this paper we study the simulated benefit of two distinct charging compensation models in the context of full-scale mask production layouts. The potential pattern placement improvements are evaluated using actual placement results obtained without charging effect corrections. An in depth comparison of the two models is presented, demonstrating the differences in placement error prediction between using a static or a dynamic charging model. We find that substantial improvements can be achieved using the dynamic charging model. Productive implementation of this functionality is the natural next step.

Citation Download Citation

Timo Wandel, Clemens Utzny, and Noriaki Nakayamada "The trouble starts with using electrons: putting charging effect correction models to the test", Proc. SPIE 8166, Photomask Technology 2011, 81661C (13 October 2011); https://doi.org/10.1117/12.898755

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available