Paper
13 October 2011 Enhancement of global CD correction and data processing in EB mask writer EBM-8000
Author Affiliations +
Abstract
We report our development of fogging effect correction method aimed for EBM-8000, our newest series of EB mask writers for mask production of 22nm half-pitch generation and for mask development of 16nm half-pitch generation. We refined the method of fogging effect correction by taking account of dose modulation for proximity effects correction and loading effect correction into fogging effect correction, greatly reducing theoretical error. Writing experiment has shown that our method based on the threshold dose model is effective, though deviation from the model is observed.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Matsumoto, Yasuo Kato, Tomoo Motosugi, Jun Yashima, Takayuki Abe, Noriaki Nakayamada, Shusuke Yoshitake, and Kiyoshi Hattori "Enhancement of global CD correction and data processing in EB mask writer EBM-8000", Proc. SPIE 8166, Photomask Technology 2011, 816620 (13 October 2011); https://doi.org/10.1117/12.898846
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KEYWORDS
Forward error correction

Critical dimension metrology

Modulation

Photomasks

Data processing

Data corrections

Data modeling

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