Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

Olaf Stenzel; Mark Schürmann; Steffen Wilbrandt; Norbert Kaiser; Andreas Tünnermann; Mathias Mende; Henrik Ehlers; Detlev Ristau; Stefan Bruns; Michael Vergöhl; Werner Riggers; Martin Bischoff; Mario Held

doi:10.1117/12.896775

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3 October 2011 Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

Olaf Stenzel, Mark Schürmann, Steffen Wilbrandt, Norbert Kaiser, Andreas Tünnermann, Mathias Mende, Henrik Ehlers, Detlev Ristau, Stefan Bruns, Michael Vergöhl, Werner Riggers, Martin Bischoff, Mario Held

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Proceedings Volume 8168, Advances in Optical Thin Films IV; 81681W (2011) https://doi.org/10.1117/12.896775
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.

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Olaf Stenzel, Mark Schürmann, Steffen Wilbrandt, Norbert Kaiser, Andreas Tünnermann, Mathias Mende, Henrik Ehlers, Detlev Ristau, Stefan Bruns, Michael Vergöhl, Werner Riggers, Martin Bischoff, and Mario Held "Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques", Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681W (3 October 2011); https://doi.org/10.1117/12.896775

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