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30 September 2011 Isara 400 ultra-precision CMM
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Abstract
This paper presents the realization of the Isara 400 ultra-precision 3D coordinate measuring machine, which features a measuring volume of 400 × 400 × 100 mm and a traceable measurement uncertainty better than 50 nm. In order to achieve these challenging specifications, specific calibration strategies need to be applied, such as the calibration of the system's mirror table. In addition, a newly developed ultra-precision tactile probe system is described, featuring a probe tip radius of 35 μm; results of the 3D sensitivity calibration of this probe are presented. Finally, results are presented measuring a full hemisphere in 3D of a SiN ultra precision master ball, resulting in a repeatability of 7.9 nm rms.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. A. M. Spaan and I. Widdershoven "Isara 400 ultra-precision CMM", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690T (30 September 2011); https://doi.org/10.1117/12.902237
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