Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations

K. Mann; U. Leinhos; J. Sudradjat; B. Schäfer

doi:10.1117/12.899503

28 November 2011 Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations

K. Mann, U. Leinhos, J. Sudradjat, B. Schäfer

Author Affiliations +

Proceedings Volume 8190, Laser-Induced Damage in Optical Materials: 2011; 81901S (2011) https://doi.org/10.1117/12.899503
Event: SPIE Laser Damage, 2011, Boulder, Colorado, United States

Abstract

A measurement system for quantitative determination of both surface and bulk contributions to the photo-thermal absorption in DUV optics was developed. It is based upon a Hartmann- Shack wavefront sensor with a sensitivity of ~λ/10000 rms, accomplishing precise on-line monitoring of wavefront deformations of a collimated test laser beam transmitted perpendicular through the excimer laser-irradiated site of a cuboid sample. Caused by the temperature dependence of the refractive index as well as thermal expansion, the initially plane wavefront of the test laser is distorted into a cylindrical shape, with bending ends towards the surface. Sign and magnitude depend on index change and expansion. By comparison with thermal theory, this transient wavefront distortion yields a quantitative absolute measure of bulk and surface absorption losses in the sample. First results for fused silica are presented.

Citation Download Citation

K. Mann, U. Leinhos, J. Sudradjat, and B. Schäfer "Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations", Proc. SPIE 8190, Laser-Induced Damage in Optical Materials: 2011, 81901S (28 November 2011); https://doi.org/10.1117/12.899503

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE