Optical correction capability of piezoelectric deformable mirror based on unimorph microactuator array

Jianqiang Ma; Yong Liu; Ying Liu; Baoqing Li; Jiaru Chu

doi:10.1117/12.900181

8 September 2011 Optical correction capability of piezoelectric deformable mirror based on unimorph microactuator array

Jianqiang Ma, Yong Liu, Ying Liu, Baoqing Li, Jiaru Chu

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 81910Y (2011) https://doi.org/10.1117/12.900181
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Piezoelectric DM based on unimorph microactuator array has advantages of large stroke with low voltage and high operating bandwidth. In this paper, we estimate the correction capability of this DM by fitting Zernike polynomials shapes. First, the influences of actuator arrangement, actuator number and coupling on correction capability were investigated to optimize the correction performance. Then low-order Zernike shapes were reproduced by a fabricated DM using measured influence function matrix. Experiment and simulation results show that the DM has a satisfying correction performance.

Citation Download Citation

Jianqiang Ma, Yong Liu, Ying Liu, Baoqing Li, and Jiaru Chu "Optical correction capability of piezoelectric deformable mirror based on unimorph microactuator array", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81910Y (8 September 2011); https://doi.org/10.1117/12.900181

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