Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip

Yuxiu Zhou; Hong Zhou; Yanxiang Liu; Yi Wang; Tie Li; Yuelin Wang

doi:10.1117/12.900520

8 September 2011 Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip

Yuxiu Zhou, Hong Zhou, Yanxiang Liu, Yi Wang, Tie Li, Yuelin Wang

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 819116 (2011) https://doi.org/10.1117/12.900520
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Infrared imaging systems are widely used in many fields, so it's of great importance to develop thermal imaging systems of independent intellectual property rights. In this paper, a novel MEMS optical readout uncooled thermal imaging chip was developed. The front-side-etching design with narrow windows shortened the etching time and greatly increased the yield. The theoretical thermal-mechanical analysis was carried out to optimize the structure parameters. Thermal conductance can be adjusted by removing part of the gold layer to compromise between the temperature response and time constant. The finite element simulation demonstrated that the performance of the pixel is in good agreement with the theoretical results, which gives a good support to the theoretical analysis. The pixels were successfully fabricated and released with high yield.

Citation Download Citation

Yuxiu Zhou, Hong Zhou, Yanxiang Liu, Yi Wang, Tie Li, and Yuelin Wang "Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819116 (8 September 2011); https://doi.org/10.1117/12.900520

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available