Closed-loop control of a MOEMS mirror integrated with angle sensor

Rong-rong Qian; Zhi-yu Wen; Li Chen; Zhongquan Wen; Biao Luo

doi:10.1117/12.900831

8 September 2011 Closed-loop control of a MOEMS mirror integrated with angle sensor

Rong-rong Qian, Zhi-yu Wen, Li Chen, Zhongquan Wen, Biao Luo

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 81911S (2011) https://doi.org/10.1117/12.900831
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

There is currently considerable interest in MOEMS mirrors because of their wide applications. As the majority of application systems require accurate control of reflection optical beams, We have developed a MOEMS mirror integrated with angle sensor. In this paper, a closed-loop control scheme for the MOEMS mirror integrated with angle sonser is proposed. Following establishment of theoretical model of the mirror, mathematical model of the closed-loop control system is presented and simulated using CAD software. Based on the study of the closed-loop control method, a closed-loop control circuit is developed. The circuit consists of signal producing module, angle detecting module, feedback control module and VGA module. The signal producing module is a frequency divider based on CPLD to provide driving signal with steady frequency. The signal frequency generated by the signal producing module is 542Hz, which matches the resonant frequency of the mirror, 543.22Hz. Key component of the circuit is variable gain amplifier made up of an analog multiplier. It controls the amplitude of the driving signal utilizing the measurement signal of the integrated angle sensor to achieve constant deflection angle of the mirror. We applied the circuit to the fabricated mirror, and experiment results show that, with the closed-loop control, the accurate control of the mirror is achieved.

Citation Download Citation

Rong-rong Qian, Zhi-yu Wen, Li Chen, Zhongquan Wen, and Biao Luo "Closed-loop control of a MOEMS mirror integrated with angle sensor", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81911S (8 September 2011); https://doi.org/10.1117/12.900831

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