Micro/nano displacement measurement using sub-pixel DSCM

Xin-zhong Li; Yu-ping Tai; Zhao-gang Nie; Li-ping Zhang; Ya-jun Wang

doi:10.1117/12.899580

19 August 2011 Micro/nano displacement measurement using sub-pixel DSCM

Xin-zhong Li, Yu-ping Tai, Zhao-gang Nie, Li-ping Zhang, Ya-jun Wang

Proceedings Volume 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging; 819213 (2011) https://doi.org/10.1117/12.899580
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

A selection method of subset size in sub-pixel displacement registration is proposed. The algorithm principle of interpolation, fitting of distribution of the correlation coefficients and gradient-based methods are introduced. Using computer-simulated speckle images, their precision and efficiency depending on the subset size are studied. The optimal method and subset size are presented in various measurement ranges, which offer measuring bases for sub-pixel in DSCM.

Citation Download Citation

Xin-zhong Li, Yu-ping Tai, Zhao-gang Nie, Li-ping Zhang, and Ya-jun Wang "Micro/nano displacement measurement using sub-pixel DSCM", Proc. SPIE 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging, 819213 (19 August 2011); https://doi.org/10.1117/12.899580

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