Research on automatic recognition technology for interference fringes in measurement of thin film thickness

Hao-ran Li; Jun-hong Su; Ai-ming Ge; Li-hong Yang

doi:10.1117/12.900510

19 August 2011 Research on automatic recognition technology for interference fringes in measurement of thin film thickness

Hao-ran Li, Jun-hong Su, Ai-ming Ge, Li-hong Yang

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Proceedings Volume 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging; 819224 (2011) https://doi.org/10.1117/12.900510
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Interference image processing is the key technology of optical interference measurement. Using high resolution image sample system to recognize the interference fringe, which substituted the traditional method measured by technological worker, is improving the measurement accuracy of thin film thickness. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO₂ film and the pre-processing of interferogram was performed. Decimal part of the interference fringes is obtained.

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Hao-ran Li, Jun-hong Su, Ai-ming Ge, and Li-hong Yang "Research on automatic recognition technology for interference fringes in measurement of thin film thickness", Proc. SPIE 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging, 819224 (19 August 2011); https://doi.org/10.1117/12.900510

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KEYWORDS

Thin films

Image processing

Interferometers

Interferometry

Metrology

Optical testing

Image filtering

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