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We present the high performance of Hg3In2Te6 metal-semiconductor photodetectors using Indium tin oxide (ITO) as the
schottky electrodes by vacuum magnetron sputtering.There is a interfacial oxide layer formation by oxygen plasma
process between Indium tin oxide (ITO) and Hg3In2Te6 semiconductor compound to change schottky barrier. The effects
of oxygen plasma treatment on Hg3In2Te6 surface property were studied. Under optimized condition, the surface of
Hg3In2Te6 is oxidated resulting in decreasing reverse dark current and increasing breakdown voltage, while the barrier
height increases from 0.5 to 0.58eV. This method is simple to fabricate high performance HgInTe devices.
L. Zhang,X. L. Zhang,W. G. Sun, andZ. X. Lu
"Photoelectron characteristics of HgInTe detector", Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 81932X (8 September 2011); https://doi.org/10.1117/12.900600
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L. Zhang, X. L. Zhang, W. G. Sun, Z. X. Lu, "Photoelectron characteristics of HgInTe detector," Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 81932X (8 September 2011); https://doi.org/10.1117/12.900600