Paper
5 December 2011 Generation of space-variant polarized beams by use of segmented subwavelength metallic gratings
Author Affiliations +
Proceedings Volume 8198, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Integration; 81980L (2011) https://doi.org/10.1117/12.904403
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China
Abstract
The generation of space-variant polarized beams by segmented subwavelength metallic gratings is demonstrated theoretically and experimentally. First, the subwavelength metallic gratings acting as a polarizing beam splitters are designed and fabricated, and its transmission properties are measured. Next, the devices composed of space-variant subwavelength metallic gratings are proposed to convert incident circularly polarized beams into space-variant polarized beams. Several types of devices are fabricated by using of e-beam lithography (EBL) and reactive ion etching (RIE) technology. Finally, the intensity and polarization properties of generated beams are measured which show a good performance of high polarization purity.
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Zhehai Zhou and Qiaofeng Tan "Generation of space-variant polarized beams by use of segmented subwavelength metallic gratings", Proc. SPIE 8198, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Integration, 81980L (5 December 2011); https://doi.org/10.1117/12.904403
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KEYWORDS
Polarization

Beam splitters

Dielectric polarization

Polarizers

Aluminum

Reactive ion etching

Electron beam lithography

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