Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology

Hao Yu; Carl Aleksoff; Jun Ni

doi:10.1117/12.906909

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28 November 2011 Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology

Hao Yu, Carl Aleksoff, Jun Ni

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Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 820206 (2011) https://doi.org/10.1117/12.906909
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

A multiple height-transfer interferometric technique was developed to increase the absolute distance measurement capability of a metrology system that uses a tunable laser. Using multiple accurately calibrated reference heights, this technique relaxes the requirement of knowing accurate wavelength information for multiple wavelength interferometry while maintaining its advantages. We present an uncertainty analysis, analyze the primary sources of uncertainties limiting the performance of this technique and discuss how errors can be minimized. Measurement results of 3D-images obtained from a variety of objects are presented. The measurement uncertainty is experimentally demonstrated to be smaller than 0.2 μm over 50 mm for two discontinuous surfaces.

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Hao Yu, Carl Aleksoff, and Jun Ni "Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 820206 (28 November 2011); https://doi.org/10.1117/12.906909

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