Studies of the super-smooth mirror roughness by grazing incidence x-ray scattering method

Wei-Tao Du; Jie Wang

doi:10.1117/12.917959

28 November 2011 Studies of the super-smooth mirror roughness by grazing incidence x-ray scattering method

Wei-Tao Du, Jie Wang

Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 82020F (2011) https://doi.org/10.1117/12.917959
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

The surface roughness of a large-size super-smooth mirror is studied by grazing incidence X-ray scattering method (GIXRS). We derive the two-dimensional theoretical model based on Tong's result in 1993; In light of our formulae, the power spectrum density (PSD) of a mirror surface can be correlated to the intensity distribution of X-ray scattering. A 210mm-long mirror is measured at the beamline 16B at Shanghai Synchrotron Radiation Facility (SSRF) and the data is analyzed. The result indicates that the root mean square (RMS) of the surface roughness calculated by our formulae is in good agreement with that measured by a white-light 3D profiler.

Citation Download Citation

Wei-Tao Du and Jie Wang "Studies of the super-smooth mirror roughness by grazing incidence x-ray scattering method", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020F (28 November 2011); https://doi.org/10.1117/12.917959

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available