Subwavelength binary blazed grating optical switch based on TiO2-on-SiO2

Junbo Yang; Zhou Wei; Hualiang Zhang; Xueao Zhang; Honghui Jia; Shiqiao Qin

doi:10.1117/12.905171

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28 November 2011 Subwavelength binary blazed grating optical switch based on TiO₂-on-SiO₂

Junbo Yang, Zhou Wei, Hualiang Zhang, Xueao Zhang, Honghui Jia, Shiqiao Qin

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Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 82020X (2011) https://doi.org/10.1117/12.905171
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

A high-perform and compact subwavelength binary blazed grating optical switch was designed based on TiO₂-on-SiO₂. By appropriate choice of grating parameters including thicknesses, periods, height, and fill factor, to optimize the diffraction properties, a relative high diffraction efficiency and large diffraction angle was obtained simultaneously. The diffraction efficiency of the first switching channel is about 80% with a 45° diffraction angle, and the diffraction efficiency of the second channel is around 90% with a 30° diffraction angle. The device layout is simple, feasible, one-step etch, and compatible with standard CMOS technology processing.

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Junbo Yang, Zhou Wei, Hualiang Zhang, Xueao Zhang, Honghui Jia, and Shiqiao Qin "Subwavelength binary blazed grating optical switch based on TiO₂-on-SiO₂", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020X (28 November 2011); https://doi.org/10.1117/12.905171

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