Translator Disclaimer
23 December 2011 On-chip surface acoustic-wave driven microfluidic motors
Author Affiliations +
We report on the design of two different surface acoustic wave (SAW) driven rotary motors. Both designs use 20-30 MHz transducers patterned onto Lithium Niobate (LN), geometrically tailored to generate Rayleigh waves that are incident on opposing sides of each rotor. The first design exploits the efficient coupling between SAWs and fluids by use of a fluid coupling layer between the rotor and substrate, leading to rotations of a 5 mm disc shaped rotor over 2,500 rpm with a start-up torque of 60 nN m. The second design exploits a dry friction contact between the surface and rotors for further miniaturisation. In the latter design 1 mm steel rotors are driven up to 6,000 rpm with no external preload required.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richie J. Shilton, Nick Glass, Sean Langelier, Peggy Chan, Leslie Y. Yeo, and James R. Friend "On-chip surface acoustic-wave driven microfluidic motors", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82041J (23 December 2011);

Back to Top