Lithography of porous materials for device fabrication

Paolo Falcaro; Plinio Innocenzi; Anita J. Hill; Cara Doherty

doi:10.1117/12.904854

23 December 2011 Lithography of porous materials for device fabrication

Paolo Falcaro, Plinio Innocenzi, Anita J. Hill, Cara Doherty

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82041X (2011) https://doi.org/10.1117/12.904854
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

Citation Download Citation

Paolo Falcaro, Plinio Innocenzi, Anita J. Hill, and Cara Doherty "Lithography of porous materials for device fabrication", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82041X (23 December 2011); https://doi.org/10.1117/12.904854

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