Design of modern nanofabrication facilities

Sarah Beswick; Andrew Smith; Dru Morrish; Daniel J. Day; Saulius Juodkazis; Min Gu

doi:10.1117/12.904711

23 December 2011 Design of modern nanofabrication facilities

Sarah Beswick, Andrew Smith, Dru Morrish, Daniel J. Day, Saulius Juodkazis, Min Gu

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82043K (2011) https://doi.org/10.1117/12.904711
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

We present a set of practical rules critical for designing and building a modern nanotechnology laboratory, focused on photonic applications in a cleanroom environment. We show the impacts on time, cost and quality of early design decisions and its importance on achieving the final fully functional laboratory. Best practice examples are presented for setting up a modern laboratory/facility, following analysis of the time, cost and quality constraints. The case study presented is the engineering and architectural solution of the nanofabrication cleanroom facility in the Advanced Technology Centre at Swinburne University of Technology, Australia. Set of practical rules is established for the cost and time efficient set up of the nanotechnology facilities for the research and development.

Citation Download Citation

Sarah Beswick, Andrew Smith, Dru Morrish, Daniel J. Day, Saulius Juodkazis, and Min Gu "Design of modern nanofabrication facilities", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043K (23 December 2011); https://doi.org/10.1117/12.904711

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