3D microstructuring inside glass by ultrafast laser

Koji Sugioka; Yasutaka Hanada; Katsumi Midorikawa; Hiroyuki Kawano; Ikuko S. Ishikawa; Atsushi Miyawaki

doi:10.1117/12.911117

12 January 2012 3D microstructuring inside glass by ultrafast laser

Koji Sugioka, Yasutaka Hanada, Katsumi Midorikawa, Hiroyuki Kawano, Ikuko S. Ishikawa, Atsushi Miyawaki

Proceedings Volume 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers; 820604 (2012) https://doi.org/10.1117/12.911117
Event: Pacific Rim Laser Damage Symposium: Optical Materials for High Power Lasers, 2011, Shanghai, China

Abstract

We demonstrate three-dimensional (3D) microstructuring inside glass by ultrafast laser to fabricate microfluidic chips integrated with some functional microcomponents such as optical attenuators and optical waveguides. The fabricated microchips are applied to understand phenomena and functions of microorganisms and cyanobacteria. Ultrafast laser irradiation followed by thermal treatment and wet etching in dilute hydrofluoric acid solution resulted in fabrication of 3D microfludic structures embedded in a photosensitive glass. The embedded microfludic structures enabled us to easily and efficiently observe Phormidium gliding to the seedling root, which accelerates growth of the vegetable. In addition, integration of optical attenuators and optical waveguides into the microfluidic structures clarified the mechanism of the gliding movement of Phormidium. We termed such integrated microchips nanoaquariums, realizing the highly efficient and functional observation and analysis of various microorganisms.

Citation Download Citation

Koji Sugioka, Yasutaka Hanada, Katsumi Midorikawa, Hiroyuki Kawano, Ikuko S. Ishikawa, and Atsushi Miyawaki "3D microstructuring inside glass by ultrafast laser", Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 820604 (12 January 2012); https://doi.org/10.1117/12.911117

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