Highly-sensitive anisotropic porous silicon based optical sensors

Jesús Álvarez; Paolo Bettotti; Neeraj Kumar; Isaac Suárez; Daniel Hill; Juan Martínez-Pastor

doi:10.1117/12.908214

31 January 2012 Highly-sensitive anisotropic porous silicon based optical sensors

Jesús Álvarez, Paolo Bettotti, Neeraj Kumar, Isaac Suárez, Daniel Hill, Juan Martínez-Pastor

Proceedings Volume 8212, Frontiers in Biological Detection: From Nanosensors to Systems IV; 821209 (2012) https://doi.org/10.1117/12.908214
Event: SPIE BiOS, 2012, San Francisco, California, United States

Abstract

The modeling, fabrication and characterization of PSi fabricated from both (110) and (100) surface oriented silicon for optical sensing is thoroughly reported. First, based on the generalized Bruggeman method, the birefringence and sensitivity of the fabricated membranes were calculated as a function of the fabrication parameters such as porosity and pore sizes; and external effects, such as the pores surface oxidation. Thereafter we report on the fabrication of PSi membranes from (110) and (100) surface oriented silicon with pore sizes in the range of 50 - 80 nm, and the characterization of their birefringence using a polarimetric setup. Their sensitivities were determined by filling the pores with several liquids having different refractive index. As a result, sensitivities as high as 1407 nm/RIU were obtained for the (110) samples at a 1500 nm wavelength and 382 nm/RIU for the (100) samples at the same wavelength.

Citation Download Citation

Jesús Álvarez, Paolo Bettotti, Neeraj Kumar, Isaac Suárez, Daniel Hill, and Juan Martínez-Pastor "Highly-sensitive anisotropic porous silicon based optical sensors", Proc. SPIE 8212, Frontiers in Biological Detection: From Nanosensors to Systems IV, 821209 (31 January 2012); https://doi.org/10.1117/12.908214

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available