Generation of new nanostructures in designed matrix by interfering femtosecond laser processing

K. Momoo; K. Sonoda; Y. Nakata; N. Miyanaga

doi:10.1117/12.909819

16 February 2012 Generation of new nanostructures in designed matrix by interfering femtosecond laser processing

K. Momoo, K. Sonoda, Y. Nakata, N. Miyanaga

Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 82431E (2012) https://doi.org/10.1117/12.909819
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

Huge numbers of 2D- or 3D- nanostructures can be generated by interfering ultra-short pulse laser processing in a single shot. Unit structures are nanowhiskers, nanoneedle, nanobump, nanomesh of metal. The distribution of these nanostructures are according to interference pattern, which can be controlled and designed by the number of beams, correlation angle, amplitude ratio and phase shifts between the beams. In this paper, we simulated the interference pattern with different combinations of these parameters. Our technique is useful for fabrication of metamaterials, in which designed unit structures are in designed periodic patterns.

Citation Download Citation

K. Momoo, K. Sonoda, Y. Nakata, and N. Miyanaga "Generation of new nanostructures in designed matrix by interfering femtosecond laser processing", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82431E (16 February 2012); https://doi.org/10.1117/12.909819

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