Material specific effects and limitations during ps-laser generation of micro structures

J. Hildenhagen; U. Engelhardt; M. Smarra; K. Dickmann

doi:10.1117/12.905948

30 January 2012 Material specific effects and limitations during ps-laser generation of micro structures

J. Hildenhagen, U. Engelhardt, M. Smarra, K. Dickmann

Proceedings Volume 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII; 824711 (2012) https://doi.org/10.1117/12.905948
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

The use of picosecond lasers for microstructuring, especially in the combination with scanner optics, leads to undesired effects with increasing ablation depths. The cavity edges slope to a degree ranging between 50° and 85°, depending on the material. With highly reflective substrates, ditches of up to 20% of their total depth can be formed on its ground structure. In certain materials also diverse substructures such as holes, canals, or grooves can be developed. These could impact the precision of the ablation geometry partially. A systematic study of the specific ablation characteristics is needed to achieve a defined depth of the structure. Considering a huge number of influential parameters, an automation of such measurements would be meaningful. For a study of eight different materials (high-alloy steels, copper, titanium, aluminum, PMMA, Al₂O₃ ceramics, silicon and fused quartz), an industrial ps-laser coupled with a chromatic sensor for distance measurement was used. Hence a direct acquisition of the generated structures as well as an automatic evaluation of the parameters is possible. Furthermore an online quality control and a local post processing can be implemented. In this way the generation of complex structures with a higher precision is possible.

Citation Download Citation

J. Hildenhagen, U. Engelhardt, M. Smarra, and K. Dickmann "Material specific effects and limitations during ps-laser generation of micro structures", Proc. SPIE 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII, 824711 (30 January 2012); https://doi.org/10.1117/12.905948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available