3D microstructures fabricated by prism-assisted inclined UV lithography

Guomin Jiang; Sarfaraz Baig; Michael R. Wang

doi:10.1117/12.908191

8 February 2012 3D microstructures fabricated by prism-assisted inclined UV lithography

Guomin Jiang, Sarfaraz Baig, Michael R. Wang

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490L (2012) https://doi.org/10.1117/12.908191
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Three-dimensional (3D) microstructures are fabricated by prism-assisted inclined ultraviolet (UV) lithography. The exposure angles of slanted structures ranging from 0° to 65° in SU-8 photoresist can be easily achieved without immersion in index matching liquid. The sample surface reflection of UV light can be utilized for the fabrication of symmetric structures. Tripod structures have been fabricated by one-step UV exposure with corner prism. Examples of various achievable 3D microstructures are presented.

Citation Download Citation

Guomin Jiang, Sarfaraz Baig, and Michael R. Wang "3D microstructures fabricated by prism-assisted inclined UV lithography", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490L (8 February 2012); https://doi.org/10.1117/12.908191

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