Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing

Frank Burmeister; Uwe D. Zeitner; Stefan Nolte; Andreas Tünnermann

doi:10.1117/12.908555

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14 February 2012 Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing

Frank Burmeister, Uwe D. Zeitner, Stefan Nolte, Andreas Tünnermann

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Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 824910 (2012) https://doi.org/10.1117/12.908555
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

We present an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics enables well corrected focusing over a working distance range of 577 μm with a numerical aperture (NA) of 1.33 thereby causing low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with the correction of aberrations with a diffractive optical element (DOE). To demonstrate the improvements for volume structuring of the polymer, we compare achievable feature sizes of structures written with our optics and a commercial available oil immersion objective (100x, NA=1.4).

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Frank Burmeister, Uwe D. Zeitner, Stefan Nolte, and Andreas Tünnermann "Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824910 (14 February 2012); https://doi.org/10.1117/12.908555

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