Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen; K. Hanhijärvi; J. Aaltonen; K. Grigoras; I. Kassamakov; S. Franssila; E. Haeggström

doi:10.1117/12.906178

15 February 2012 Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggström

Author Affiliations +

Proceedings Volume 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI; 825008 (2012) https://doi.org/10.1117/12.906178
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Scanning White Light Interferometry (SWLI) provides high vertical precision for measuring step-like structures in microelectromechanical systems (MEMS). The SWLI performance depends on its light source. A rapidly modulated light source with a broad bandwidth inside the infrared (IR) region is necessary to measure layered MEMS that move. Typical SWLI light sources - light emitting diodes (LEDs) and Halogen (HG) bulbs - fulfill only one of these requirements. To overcome this shortcoming we equipped our SWLI setup with a supercontinuum (SC) light source produced by Fiberware Gmbh (Ilum 100 USB II). We tested our setup by measuring in plane and out of plane oscillating thermal bridges with visible light, as well as top and bottom surfaces of silicon structures using IR light. The wide SC spectrum creates localized interferograms. This allowed us to measure top and bottom surfaces of a thin (4 μm) bridge. The stroboscopically measured profiles of oscillating thermal bridges were comparable to those measured using a white LED. The results of static measurements were similar to those achieved with an HG lamp.

Citation Download Citation

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, and E. Haeggström "Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry", Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 825008 (15 February 2012); https://doi.org/10.1117/12.906178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available