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15 February 2012 Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 825205 (2012) https://doi.org/10.1117/12.910671
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
A Scan Head package including two 1D resonant electrostatic driven micro scanning mirrors with piezoresistive position detection was developed. The scanning frequency of the slow and the fast axis is 100Hz and 29,05kHz, allowing WVGA-resolution. Thereby the Scan Head design reduces vertical distortion strongly and can potentially be assembled automatically. In addition FPGA based video processing electronic was developed to improve the sorting of the picture information corresponding to the Lissajous figure with the objective of high picture contrast and a homogeneous brightness.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Grahmann, Michael Wildenhain, Thomas Grasshoff, Christian Gerwig, Hans-Georg Dallmann, Alexander Wolter, and Harald Schenk "Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 825205 (15 February 2012); https://doi.org/10.1117/12.910671
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