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15 February 2012 Shared shuttles for integrated silicon optoelectronics
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520G (2012) https://doi.org/10.1117/12.913096
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
Shared shuttle runs are an important factor of the microelectronics business ecosystem, allowing fabless semiconductor companies to access advanced processes and supporting the development of new tools and processes. We report on the creation and progress of a shared shuttle program for access to advanced silicon photonics optoelectronic platforms that we expect will create a similar environment for the field of integrated photonics.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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