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15 February 2012 Optical position feedback for electrostatically driven MOEMS scanners
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520S (2012)
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
For MOEMS devices which do not have intrinsic on-chip feedback, position information can be provided with optical methods, most simply by using a reflection from the backside of a MOEMS scanner. Measurement of timing signals using fast differential photodiodes can be used for resonant scanner mirrors performing sinusoidal motion with large amplitude. While this approach provides excellent accuracy it cannot be directly extended to arbitrary trajectories or static deflection angles. Another approach is based on the measurement of the position of the reflected laser beam with a quadrant diode. In this work, we present position sensing devices based on either principle and compare both approaches showing first experimental results from the implemented devices
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Tortschanoff, M. Baumgart, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, and A. Kenda "Optical position feedback for electrostatically driven MOEMS scanners", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520S (15 February 2012);

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