You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
15 February 2012Closed-loop control for quasi-static MOEMS mirrors
In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS)
based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been
implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the
devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10
compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations
for fast signals due to time discretization.
The alert did not successfully save. Please try again later.
A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner, "Closed-loop control for quasi-static MOEMS mirrors," Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520T (15 February 2012); https://doi.org/10.1117/12.907825