Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

Denis Jung; Thilo Sandner; David Kallweit; Harald Schenk

doi:10.1117/12.906690

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15 February 2012 Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

Denis Jung, Thilo Sandner, David Kallweit, Harald Schenk

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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520U (2012) https://doi.org/10.1117/12.906690
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and ±7.5° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.

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Denis Jung, Thilo Sandner, David Kallweit, and Harald Schenk "Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520U (15 February 2012); https://doi.org/10.1117/12.906690

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