Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes

Jong Yeon Park; James E. Gardner; Praveen Pasupathy; Ji Won Suk; Rodney S. Ruoff; Dean P. Neikirk

doi:10.1117/12.906290

15 February 2012 Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes

Jong Yeon Park, James E. Gardner, Praveen Pasupathy, Ji Won Suk, Rodney S. Ruoff, Dean P. Neikirk

Author Affiliations +

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520Y (2012) https://doi.org/10.1117/12.906290
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

We present fabrication and characterization of wavelength selective germanium dielectric supported microbolometers using a self-alignment technique to help insure a flat microbolometer membrane. The fabricated microbolometer consists of a resistive absorber sheet on a quarter wavelength germanium layer above a half wavelength air gap, producing dielectric interference [1]. We use a self-aligned process without a polyimide patterning process that helps eliminate deformation and stress in the structure membrane. We demonstrated that the fabricated wavelength selective microbolometers have flat, robust membranes and produce excellent tunable narrowband absorption in MWIR/LWIR band with efficient multi-color IR spectral response using wavelength selective pixels.

Citation Download Citation

Jong Yeon Park, James E. Gardner, Praveen Pasupathy, Ji Won Suk, Rodney S. Ruoff, and Dean P. Neikirk "Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520Y (15 February 2012); https://doi.org/10.1117/12.906290

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available