Design of multilayered SiON strip waveguide for polarizer applications

Vishnu Priye; Janardan Prasad; . Anamika

doi:10.1117/12.907921

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2 February 2012 Design of multilayered SiON strip waveguide for polarizer applications

Vishnu Priye, Janardan Prasad, . Anamika

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Proceedings Volume 8264, Integrated Optics: Devices, Materials, and Technologies XVI; 82640K (2012) https://doi.org/10.1117/12.907921
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

A four layered strip waveguide grown on silicon substrate and having a silicon oxynitride (SiON) guiding film with silicon oxide (SiO₂) as buffer and cover is proposed and analyzed through transfer matrix formulation and effective index method. Dependence of polarization characteristic on waveguide parameters such as refractive index of SiON, buffer thickness and aspect ratio (b/a) of the strip waveguide are investigated. It is shown that by selecting an optimal combination of different waveguide parameters, a TE-mode polarizer having polarization extinction ratio of 200 dB and insertion loss of less than 1 dB/cm can be realized.

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Vishnu Priye, Janardan Prasad, and . Anamika "Design of multilayered SiON strip waveguide for polarizer applications", Proc. SPIE 8264, Integrated Optics: Devices, Materials, and Technologies XVI, 82640K (2 February 2012); https://doi.org/10.1117/12.907921

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