Position measurement in standing wave interferometer for metrology of length

Josef Lazar; Ondřej Číp; Jindřich Oulehla; Pavel Pokorný; Antonín Fejfar; Jiří Stuchlík

doi:10.1117/12.913615

11 October 2011 Position measurement in standing wave interferometer for metrology of length

Josef Lazar, Ondřej Číp, Jindřich Oulehla, Pavel Pokorný, Antonín Fejfar, Jiří Stuchlík

Proceedings Volume 8306, Photonics, Devices, and Systems V; 830607 (2011) https://doi.org/10.1117/12.913615
Event: Photonics Prague 2011, 2011, Prague, Czech Republic

Abstract

We present techniques oriented to improvement of precision in incremental interferometric measurements of displacements over a limited displacement range. The wavelength of the coherent laser source is here directly stabilized to a mechanical reference and not to a reference of any optical frequency. This may represent a reduction of uncertainty linking the laser wavelength not to indirectly evaluated refractive index but to the setup mechanics which cannot be completely eliminated. Here we suggest an approach where the traditional interferometers are replaced by a passive Fabry-Perot cavity with position sensing using an intracavity transparent photodetector.

Citation Download Citation

Josef Lazar, Ondřej Číp, Jindřich Oulehla, Pavel Pokorný, Antonín Fejfar, and Jiří Stuchlík "Position measurement in standing wave interferometer for metrology of length", Proc. SPIE 8306, Photonics, Devices, and Systems V, 830607 (11 October 2011); https://doi.org/10.1117/12.913615

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