Application of infrared ATR ellipsometry for measurement of solid samples: calibration procedure

Zuzana Mrázková; David Hrabovský; Kamil Postava; Jaromír Pištora

doi:10.1117/12.914242

11 October 2011 Application of infrared ATR ellipsometry for measurement of solid samples: calibration procedure

Zuzana Mrázková, David Hrabovský, Kamil Postava, Jaromír Pištora

Proceedings Volume 8306, Photonics, Devices, and Systems V; 83060S (2011) https://doi.org/10.1117/12.914242
Event: Photonics Prague 2011, 2011, Prague, Czech Republic

Abstract

Attenuated total reflection (ATR) is widely used in infrared spectral range for measurement of surface properties of solid samples, powders, and liquids. In this paper we use a commercial Fourier-transform infrared (FTIR) spectrometer Vertex 70v from Bruker company equipped with the ATR Golden Gate accessory from Specac. To increase sensitivity of the method we included infrared polarizer and analyzer, which enable measurement of the reflected amplitudes ratio and the phase differences between p- and s-polarizations in the frame of the ATR ellipsometry. Procedure of ellipsometric angles measurement is proposed using data acquisition at several azimuthal angles of polarizers. Spectral dependence of real polarizer extinction ratio, partial polarization of beam coming from the interferometer and polarization sensitivity of infrared detector are presented.

Citation Download Citation

Zuzana Mrázková, David Hrabovský, Kamil Postava, and Jaromír Pištora "Application of infrared ATR ellipsometry for measurement of solid samples: calibration procedure", Proc. SPIE 8306, Photonics, Devices, and Systems V, 83060S (11 October 2011); https://doi.org/10.1117/12.914242

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available