Influence of deposition conditions of ZnO thin films on their photonic properties

Marie Netrvalová; Lucie Prušáková; Petr Novák; Pavel Šutta

doi:10.1117/12.912462

11 October 2011 Influence of deposition conditions of ZnO thin films on their photonic properties

Marie Netrvalová, Lucie Prušáková, Petr Novák, Pavel Šutta

Proceedings Volume 8306, Photonics, Devices, and Systems V; 830618 (2011) https://doi.org/10.1117/12.912462
Event: Photonics Prague 2011, 2011, Prague, Czech Republic

Abstract

The effects of deposition conditions (especially lateral position against target during deposition and deposition temperature) on optical properties and structure are presented. The X-ray diffraction (XRD) analysis showed that all the films were polycrystalline with hexagonal structure and preferred orientation in [001] direction perpendicular to the substrate surface. Micro-structure properties as crystallite size and micro-strains were not too influenced by deposition conditions and values of crystallites were evaluated in tens of nanometers and micro-strains were about 10^-2. Film thicknesses obtained from transmittance spectra decreased more than two times with increased lateral position of the samples against the target. Dispersion of the spectral refractive index was observed depending on the sample position in deposition chamber. Smaller dispersion was observed in series containing more redundant oxygen in their structure.

Citation Download Citation

Marie Netrvalová, Lucie Prušáková, Petr Novák, and Pavel Šutta "Influence of deposition conditions of ZnO thin films on their photonic properties", Proc. SPIE 8306, Photonics, Devices, and Systems V, 830618 (11 October 2011); https://doi.org/10.1117/12.912462

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available