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15 November 2011 Nonlinear analysis and dynamic compensation of stylus scanning measurement with wide range
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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83213U (2011) https://doi.org/10.1117/12.905506
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China
Abstract
Surface topography is an important geometrical feature of a workpiece that influences its quality and functions such as friction, wearing, lubrication and sealing. Precision measurement of surface topography is fundamental for product quality characterizing and assurance. Stylus scanning technique is a widely used method for surface topography measurement, and it is also regarded as the international standard method for 2-D surface characterizing. Usually surface topography, including primary profile, waviness and roughness, can be measured precisely and efficiently by this method. However, by stylus scanning method to measure curved surface topography, the nonlinear error is unavoidable because of the difference of horizontal position of the actual measured point from given sampling point and the nonlinear transformation process from vertical displacement of the stylus tip to angle displacement of the stylus arm, and the error increases with the increasing of measuring range. In this paper, a wide range stylus scanning measurement system based on cylindrical grating interference principle is constructed, the originations of the nonlinear error are analyzed, the error model is established and a solution to decrease the nonlinear error is proposed, through which the error of the collected data is dynamically compensated.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Heiyang Hui, Xiaojun Liu, and Wenlong Lu "Nonlinear analysis and dynamic compensation of stylus scanning measurement with wide range", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83213U (15 November 2011); https://doi.org/10.1117/12.905506
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