Modeling and simulation of acid diffusion in chemically amplified resists with polymer-bound acid generator

Takahiro Kozawa; Julius Joseph Santillan; Toshiro Itani

doi:10.1117/12.916293

20 March 2012 Modeling and simulation of acid diffusion in chemically amplified resists with polymer-bound acid generator

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani

Author Affiliations +

Proceedings Volume 8322, Extreme Ultraviolet (EUV) Lithography III; 832206 (2012) https://doi.org/10.1117/12.916293
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The chemically amplified resist with a polymer-bound acid generator is a promising material for 16 nm node and beyond. However, its reaction mechanism is unknown. In this study, we propose a proton diffusion model for the chemically amplified resist with a polymer-bound acid generator. To examine the proton diffusion model, we carried out patterning experiments and simulation. The calculated latent images were compared with the measured line width and line edge roughness. The reaction mechanisms of the chemically amplified resist with a polymer-bound resist is discussed.

Citation Download Citation

Takahiro Kozawa, Julius Joseph Santillan, and Toshiro Itani "Modeling and simulation of acid diffusion in chemically amplified resists with polymer-bound acid generator", Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 832206 (20 March 2012); https://doi.org/10.1117/12.916293

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available