Microfabrication of IPMC cilia for bio-inspired flow sensing

Hong Lei; Wen Li; Xiaobo Tan

doi:10.1117/12.917525

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3 April 2012 Microfabrication of IPMC cilia for bio-inspired flow sensing

Hong Lei, Wen Li, Xiaobo Tan

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Proceedings Volume 8340, Electroactive Polymer Actuators and Devices (EAPAD) 2012; 83401A (2012) https://doi.org/10.1117/12.917525
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2012, San Diego, California, United States

Abstract

As the primary flow sensing organ for fishes, the lateral line system plays a critical role in fish behavior. Analogous to its biological counterpart, an artificial lateral line system, consisting of arrays of micro flow sensors, is expected to be instrumental in the navigation and control of underwater robots. In this paper we investigate the microfabrication of ionic polymer-metal composite (IPMC) cilia for the purpose of flow sensing. While existing macro- and microfabrication methods for IPMCs have predominantly focused on planar structures, we propose a device where micro IPMC beams stand upright on a substrate to effectively interact with the flow. Challenges in the casting of 3D Nafion structure and selective formation of electrodes are discussed, and potential solutions for addressing these challenges are presented together with preliminary microfabrication results.

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Hong Lei, Wen Li, and Xiaobo Tan "Microfabrication of IPMC cilia for bio-inspired flow sensing", Proc. SPIE 8340, Electroactive Polymer Actuators and Devices (EAPAD) 2012, 83401A (3 April 2012); https://doi.org/10.1117/12.917525

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