Pump it up

Luc Maffli; Benjamin O'Brien; Samuel Rosset; Herbert Shea

doi:10.1117/12.914831

3 April 2012 Pump it up

Luc Maffli, Benjamin O'Brien, Samuel Rosset, Herbert Shea

Proceedings Volume 8340, Electroactive Polymer Actuators and Devices (EAPAD) 2012; 83402Q (2012) https://doi.org/10.1117/12.914831
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2012, San Diego, California, United States

Abstract

We report on the use of zipping actuation applied to dielectric elastomer actuators to microfabricate mm-sized pumps. The zipping actuators presented here use electrostatic attraction to deform an elastomeric membrane by pulling it into contact with a rigid counter electrode. We present several actuation schemes using either conventional DEA actuation, zipping, or a combination of both in order to realize microfluidic devices. A zipping design in which the electric field is applied across the elastomer membrane was explored theoretically and experimentally. Single zipping chambers and a micropump body made of a three chambers connected by an embedded channel were wet-etched into a silicon wafer and subsequently covered by a gold-implanted silicone membrane. We measured static deflections of up to 300 μm on chambers with square openings of 1.8 and 2.6 mm side, in very good agreement with our model.

Citation Download Citation

Luc Maffli, Benjamin O'Brien, Samuel Rosset, and Herbert Shea "Pump it up", Proc. SPIE 8340, Electroactive Polymer Actuators and Devices (EAPAD) 2012, 83402Q (3 April 2012); https://doi.org/10.1117/12.914831

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