Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication

N. Izza M. Nor; K. Shah; J. Singh; N. Khalid; Z. Sauli

doi:10.1117/12.915042

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8 May 2012 Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication

N. Izza M. Nor, K. Shah, J. Singh, N. Khalid, Z. Sauli

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Proceedings Volume 8341, Active and Passive Smart Structures and Integrated Systems 2012; 83411R (2012) https://doi.org/10.1117/12.915042
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2012, San Diego, California, United States

Abstract

This paper presents design of a Film Bulk Acoustic Wave Resonators (FBARs) consisting of piezoelectric film, aluminium nitride (AlN) with top and bottom electrodes of ruthenium (Ru). The lumped Butterworth-Van Dyke (BVD) Circuit model is used to investigate the theoretical harmonic response and extraction equivalent circuit of the FBAR. A three-dimensional (3D) Finite Element Method (FEM) is used to evaluate the electro-mechanical performance of the FBAR. The one-dimension (1D) numerical and the 3D FEM simulation results are analysed and compared. The results show that coupling coefficient (k² _eff) up to 7.0% can be obtained with optimised thickness ratio of electrode/piezoelectric layers. A Figure of Merit (FOM) that considers k² _eff and quality (Q) factor is used for comparison. The area of FBAR is 900μm² and the active filter area size of the FBAR filter is 5400μm². The FBAR filter is designed for operation in Kuband with centre frequency of 15.5 GHz and fractional bandwidth of 2.6%. The proposed FBAR filter has insertion loss of -2.3dB which will improve the performance of Ku-band transceiver and improve communication range and data rates in Ku-band communication links.

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N. Izza M. Nor, K. Shah, J. Singh, N. Khalid, and Z. Sauli "Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication", Proc. SPIE 8341, Active and Passive Smart Structures and Integrated Systems 2012, 83411R (8 May 2012); https://doi.org/10.1117/12.915042

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