You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
17 May 2012Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
As is generally known, miniature infrared spectrometers have great potential, e. g. for process and environmental
analytics or in medical applications. Many efforts are being made to shrink conventional spectrometers, such as FTIR or
grating based devices. A more rigorous approach for miniaturization is the use of MEMS technologies. Based on an
established design for the MWIR new MEMS Fabry-Perot filters and sensors with expanded spectral ranges in the LWIR
have been developed. The range 5.5 - 8 μm is particularly suited for the analysis of liquids. A dual-band sensor, which
can be simultaneously tuned from 4 - 5 μm and 8 - 11 μm for the measurement of anesthetics and carbon dioxide has also
been developed. A new material system is used to reduce internal stress in the reflector layer stack. Good results in terms
of finesse (≤ 60) and transmittance (≤ 80 %) could be demonstrated. The hybrid integration of the filter in a pyroelectric
detector results in very compact, robust and cost effective microspectrometers. FP filters with two moveable reflectors
instead of only one reduce significantly the acceleration sensitivity and actuation voltage.
The alert did not successfully save. Please try again later.
Martin Ebermann, Norbert Neumann, Karla Hiller, Elvira Gittler, Marco Meinig, Steffen Kurth, "Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers," Proc. SPIE 8374, Next-Generation Spectroscopic Technologies V, 83740X (17 May 2012); https://doi.org/10.1117/12.919169