3D microscopic imaging at 193nm with single beam Fresnel intensity sampling and iterative phase retrieval

Arun Anand; Ahmad Faridian; Vani K. Chhaniwal; Giancarlo Pedrini; Wolfgang Osten; Bahram Javidi

doi:10.1117/12.919988

14 May 2012 3D microscopic imaging at 193nm with single beam Fresnel intensity sampling and iterative phase retrieval

Arun Anand, Ahmad Faridian, Vani K. Chhaniwal, Giancarlo Pedrini, Wolfgang Osten, Bahram Javidi

Proceedings Volume 8384, Three-Dimensional Imaging, Visualization, and Display 2012; 83840A (2012) https://doi.org/10.1117/12.919988
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

3D imaging requires the retrieval of both amplitude and phase of the wavefront interacting with the object. Quantitative phase contrast imaging technique like digital holography uses the interference of object and a known reference wavefront for whole field reconstructions. And for higher lateral resolution, uses of shorter wavelengths become necessary. For short wavelength sources, due to short coherence lengths, it becomes very difficult to implement a two-beam interferometric setup. We have developed a technique for reconstructing the amplitude and phase of object wavefront from the volume diffraction field by sampling it at several axial positions and implementing the scalar diffraction integral iteratively. This technique is extended to 3D microscopic imaging at 193 nanometers.

Citation Download Citation

Arun Anand, Ahmad Faridian, Vani K. Chhaniwal, Giancarlo Pedrini, Wolfgang Osten, and Bahram Javidi "3D microscopic imaging at 193nm with single beam Fresnel intensity sampling and iterative phase retrieval", Proc. SPIE 8384, Three-Dimensional Imaging, Visualization, and Display 2012, 83840A (14 May 2012); https://doi.org/10.1117/12.919988

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KEYWORDS

Wavefronts

Diffraction

Wave propagation

3D image processing

Phase retrieval

Stereoscopy

Deep ultraviolet

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