Paper
24 October 2012 Wavelength tunable laser based on distributed reflectors with deep submicron slots
Li Zou, Lei Wang, Tingting Yu, Jian-Jun He
Author Affiliations +
Proceedings Volume 8412, Photonics North 2012; 84120O (2012) https://doi.org/10.1117/12.2001584
Event: Photonics North 2012, 2012, Montréal, Canada
Abstract
To reduce the cost of wavelength tunable lasers, the structure and fabrication methods of a wavelength tunable laser based on distributed reflectors with deep-submicron slots are proposed. By using a pillar reversing technique, the device is fabricated with standard UV lithography. The features and benefits of reflectors with deep-submicron slots are simulated and explained. As high as 47dB side mode suppression ratio and 50nm tuning range around 1550nm is achieved.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Li Zou, Lei Wang, Tingting Yu, and Jian-Jun He "Wavelength tunable laser based on distributed reflectors with deep submicron slots", Proc. SPIE 8412, Photonics North 2012, 84120O (24 October 2012); https://doi.org/10.1117/12.2001584
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Etching

Tunable lasers

Reflectors

Semiconducting wafers

Silica

Chromium

Lithography

RELATED CONTENT


Back to Top