Single-shot profilometry of rough surfaces using hyperspectral interferometry

Pablo D. Ruiz; Jonathan M. Huntley; Taufiq Widjanarko

doi:10.1117/12.978288

11 September 2012 Single-shot profilometry of rough surfaces using hyperspectral interferometry

Pablo D. Ruiz, Jonathan M. Huntley, Taufiq Widjanarko

Proceedings Volume 8413, Speckle 2012: V International Conference on Speckle Metrology; 84130G (2012) https://doi.org/10.1117/12.978288
Event: SPECKLE 2012: V International Conference on Speckle Metrology, 2012, Vigo, Spain

Abstract

The measurement of surface profile is a vital quality control procedure in many industries. For small objects (dimensions below ~10 mm) with rough or discontinuous surfaces, scanning white light interferometry (SWLI) is currently the method of choice. However, with a resolution of ~1 nm, vibration during the scan induces motion artifacts and prevents its routine use on the production line. We present a system that avoids temporal scanning by spectrally splitting the white light interferogram into a set of interferograms at different wavenumbers which are recorded simultaneously on an image sensor. The system essentially consists of an interferometer coupled to a single-shot hyperspectral imaging system. Fourier transformation along the wavenumber axis provides an absolute optical path difference for each point in the field of view, a procedure which is robust even on optically rough surfaces. Height maps with a spatial resolution of 19×19 pixels and a measurement accuracy of ~460 nm are demonstrated.

Citation Download Citation

Pablo D. Ruiz, Jonathan M. Huntley, and Taufiq Widjanarko "Single-shot profilometry of rough surfaces using hyperspectral interferometry", Proc. SPIE 8413, Speckle 2012: V International Conference on Speckle Metrology, 84130G (11 September 2012); https://doi.org/10.1117/12.978288

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