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16 October 2012 Ultra-precision surface polishing using ion beam figuring
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Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161O (2012) https://doi.org/10.1117/12.973725
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
Contrary to conventional mechanical polishing methods using polyurethane or pitch tool, non-contact polishing technique based on ion beam sputtering provides deterministic and ultra-precision surfacing at any given surfaces. Owing to no contact between a tool and a workpiece, several issues related to tool wear and edge effects can be evitable. Moreover, the atomic level sputtering makes it possible to obtain ultra-precision optical surfaces with a sub-nanometer surface roughness. In this paper, we have simulated ion beam figuring process according to the characteristics of ion beam and performed a simple test.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Young-Sik Ghim, Shin-Jae You, Hyug-Gyo Rhee, Ho-Soon Yang, and Yun-Woo Lee "Ultra-precision surface polishing using ion beam figuring", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161O (16 October 2012); https://doi.org/10.1117/12.973725
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