Study on the best arrangement of sensors used in the deformation measurement of active lap based on genetic algorithm

Hongshen Zhao; Xiaojin Li; Zhige Zeng

doi:10.1117/12.974278

16 October 2012 Study on the best arrangement of sensors used in the deformation measurement of active lap based on genetic algorithm

Hongshen Zhao, Xiaojin Li, Zhige Zeng

Author Affiliations +

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161Y (2012) https://doi.org/10.1117/12.974278
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The deformation measurement of active lap before being used to polish the mirror is one of the key factors that restrict the mirror’s quality. Usually micro displacement sensors are used to measure the deformation. The sensors are located on a square grid or a circle array, but different arrangements of sensor array bring different accuracies. Which arrangement is the best for the measuring is unknown at present. A method of calculating the best arrangement of the sensor array is put forward. Firstly, Zernike polynomial is used to represent and reconstruct the lap surface, meanwhile, the variables concerned such as the number of sensor circles and the sensor number of each circle are shown. Secondly, we choose the RMS of measurement error as the standard to judge whether an arrangement is better or worse. Thirdly, Genetic Algorithm is widely used in optimization, especially in the optimization with a lot of variables. Here using the Genetic Algorithm we can successfully achieve a better arrangement of the sensors after some generations’ evolution. The result shows that using the optimized arrangement can improve the measurement accuracy. Examples shown can prove the theory is correct.

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Hongshen Zhao, Xiaojin Li, and Zhige Zeng "Study on the best arrangement of sensors used in the deformation measurement of active lap based on genetic algorithm", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161Y (16 October 2012); https://doi.org/10.1117/12.974278

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KEYWORDS

Sensors

Genetic algorithms

Mirrors

Optimization (mathematics)

Polishing

Surface finishing

Zernike polynomials

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