Thermal-structural-optical analysis for the lens of high-precision interferometer

Juan Zhang; Yong-qian Wu; Fan Wu

doi:10.1117/12.974282

16 October 2012 Thermal-structural-optical analysis for the lens of high-precision interferometer

Juan Zhang, Yong-qian Wu, Fan Wu

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84162E (2012) https://doi.org/10.1117/12.974282
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Thermal/Structural/Optical (TSO) integrated analysis is used for simulating the deformation of the interferometer lens which is caused by temperature, support structure and gravity .The FEA model is established to make structure analysis and thermal analysis, and the temperature data is transformed to the analysis model to make thermal elastic analysis. Secondly, fitting out of the coefficients into the optical design software program for system evaluation of image quality with Zernike polynomial as a interface tool and evaluating the influence of temperature load on optical system performance. Reasonable thermal control methods are expected to effectively reduce the temperature gradients and improve image quality. The results shows that the wave front aberration of the system achieved is better than λ/50 (RMS) with the temperature difference should be less than ± 0.015ºC in mirror axis direction which can be fulfilled with the image quality demand under the support method. Besides, the data offered here will be useful for a reasonable design of the High-precision Interferometer lens.

Citation Download Citation

Juan Zhang, Yong-qian Wu, and Fan Wu "Thermal-structural-optical analysis for the lens of high-precision interferometer", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84162E (16 October 2012); https://doi.org/10.1117/12.974282

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