Experimental study on absolute test of spherical surfaces with shift-rotation method

Weihong Song; Fan Wu; Xi Hou

doi:10.1117/12.974971

15 October 2012 Experimental study on absolute test of spherical surfaces with shift-rotation method

Weihong Song, Fan Wu, Xi Hou

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84172A (2012) https://doi.org/10.1117/12.974971
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ~0.4nm while the PV is very sensitive to environmental effects.

Citation Download Citation

Weihong Song, Fan Wu, and Xi Hou "Experimental study on absolute test of spherical surfaces with shift-rotation method", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84172A (15 October 2012); https://doi.org/10.1117/12.974971

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