This paper introduced a new method to fabricate free-form micro lens array. A conductive template was deformed by
applied voltage on its underneath electrodes, and polymer primer was poured in this template to form a micro lens array
after curing and de-molding process. A integrate simulation process of the micro lens array was proposed. The geometry
of the template at a certain bias was figured out through multiple physical field simulation. Next, a three dimensional
solid body was generated surrounded by the deformed surface of the template and a flat surface. Finally, This solid body
was input into an optical lens simulation environment to obtain its optical performance. As a demonstration, a PDMS
free-form micro lens array was designed and fabricated using this Molding by Electrostatic Force Deformed Template
(MEFDT) method successfully. Metal electrodes layer, SU-8 layer and conductive membrane layer were deposited and
patterned in sequence to realize the template, and then PDMS micro lens array was duplicated using this template with an
applied voltage. Through changing the initial shape of the template as well as the position and bias of the electrodes, this
MEFDT method is believed to have the ability to achieve micrometer size lens with precisely controlled geometry.
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