Effect of Annealing on Optical Properties and Structure of the Vanadium Dioxide Thin Films

Huiqun Zhu; Yi Li; Yuming Li; Yize Huang; Guoxiang Tong; Baoying Fang; Qiuxin Zheng; Liu Li; Yujian Shen

doi:10.1117/12.978622

15 October 2012 Effect of annealing on optical properties and structure of the vanadium dioxide thin films

Huiqun Zhu, Yi Li, Yuming Li, Yize Huang, Guoxiang Tong, Baoying Fang, Qiuxin Zheng, Liu Li, Yujian Shen

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84181S (2012) https://doi.org/10.1117/12.978622
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

VO₂ thin films were prepared on soda-lime glass substrates by DC magnetron sputtering at room temperature using vanadium target and post annealing in air. X-ray diffraction and FTIR spectroscopy analyses showed that the films obtained at the optimized parameters have high VO₂ (011) orientation. Both low temperature deposition and post annealing method were beneficial to grow the nano-films with pure VO₂ phase-structure and composition. Metalinsulator transition properties of the VO₂ films in terms of infrared transmittance, transmittance variation and film thickness were investigated under varying annealing temperature. Results showed that infrared transmittance variation and transition temperature of the nano-films were significantly improved and reduced respectively. Therefore, this study was able to develop practical low-cost preparation methods for high-performance intelligent energy-saving thin films.

Citation Download Citation

Huiqun Zhu, Yi Li, Yuming Li, Yize Huang, Guoxiang Tong, Baoying Fang, Qiuxin Zheng, Liu Li, and Yujian Shen "Effect of annealing on optical properties and structure of the vanadium dioxide thin films", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181S (15 October 2012); https://doi.org/10.1117/12.978622

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